Growth and characterization of nanodiamond layers prepared using the plasma-enhanced linear antennas microwave CVD system

Frantisek Fendrych (1) , Andrew Taylor (1) , Ladislav Peksa (1) , Irena Kratochvilova (1) , Jan Vlcek (2) , Vladimira Rezacova (3) , Vaclav Petrak (3) , Zdenek Kluiber (1, 3) , Ladislav Fekete (1) , Michael Liehr (4) , Milos Nesladek (5)

1 Institute of Physics
2 Institute of Chemical Technology
3 Faculty of Biomedical Engineering
4 Leybold Optics Dresden GmbH
5 Institute for Materials Research

Mots clés: Physical Sciences

Frantisek Fendrych, Andrew Taylor, Ladislav Peksa, Irena Kratochvilova, Jan Vlcek, et al.. Growth and characterization of nanodiamond layers prepared using the plasma-enhanced linear antennas microwave CVD system. Journal of Physics D: Applied Physics, 2010, 43 (37), pp.374018. ⟨10.1088/0022-3727/43/37/374018⟩. ⟨hal-00569707⟩