Investigating the plasma chemistry for the synthesis of carbon nanotubes/nanofibres in an inductively coupled plasma enhanced CVD system: the effect of different gas mixtures

M Mao (1) , A Bogaerts (1)

1 Dept. of Chemistry

A hybrid model, called the Hybrid Plasma Equipment Model (HPEM) was used to study an inductively coupled plasma in gas mixtures of H 2 or NH 3 with CH 4 or C 2 H 2 used for the synthesis of carbon nanotubes or carbon nanofibers (CNTs/CNFs). The plasma properties are discussed for the different gas mixture at low and moderate pressure, and the growth precursors for CNTs/CNFs are analyzed. It is found that C 2 H 2, C 2 H 4, and C 2 H 6 are the predominant molecules in CH 4 containing plasmas beside the feedstock gas, and serve as carbon sources for CNT/CNF formation. On the other hand, long chain hydrocarbons are observed in C 2 H 2 containing plasmas. Furthermore, the background gases CH 4 and C 2 H 2 show a different decomposition rate with H 2 or NH 3 addition at moderate pressures.

Mots clés: Physical Sciences

M Mao, A Bogaerts. Investigating the plasma chemistry for the synthesis of carbon nanotubes/nanofibres in an inductively coupled plasma enhanced CVD system: the effect of different gas mixtures. Journal of Physics D: Applied Physics, 2010, 43 (20), pp.205201. ⟨10.1088/0022-3727/43/20/205201⟩. ⟨hal-00569604⟩