Phase resolved optical emission spectroscopy: a non-intrusive diagnostic to study electron dynamics in capacitive radio frequency discharges

J Schulze (1) , E Schüngel (1) , Z Donkó (2) , D Luggenhölscher (1) , U Czarnetzki (1)

1 Institute for Plasma and Atomic Physics
2 Research Institute for Solid State Physics and Optics [Budapest]

Various types of capacitively coupled radio frequency (CCRF) discharges are frequently used for different applications ranging from chip and solar cell manufacturing to the creation of biocompatible surfaces. In many of these discharges electron heating and electron dynamics are not fully understood. A powerful diagnostic to study electron dynamics in CCRF discharges is Phase Resolved Optical Emission Spectroscopy (PROES). It is non-intrusive and provides access to the dynamics of highly energetic electrons, that sustain the discharge via ionization, with high spatial and temporal resolution within the RF period. Based on a time dependent model of the excitation dynamics of specifically chosen rare gas levels PROES provides access to plasma parameters such as the electron temperature, electron density and electron energy distribution function (EEDF). In this work the method of PROES is reviewed and some examples of its application are discussed. First, the generation of highly energetic electron beams by the expanding sheath in geometrically symmetric as well as asymmetric discharges and their effect on the EEDF are investigated. Second, the physical nature of the frequency coupling in dual frequency discharges operated at substantially different frequencies is discussed. Third, the generation of electric field reversals during sheath collapse in single and dual frequency discharges is analyzed. Then excitation dynamics in an electrically asymmetric novel type of dual frequency discharge is studied. Finally, limitations of PROES are discussed.

Mots clés: 52.20.-j; 52.27.Aj; 52.40.Kh; 52.50.Qt; 52.70.-m; 52.70.Kz

J Schulze, E Schüngel, Z Donkó, D Luggenhölscher, U Czarnetzki. Phase resolved optical emission spectroscopy: a non-intrusive diagnostic to study electron dynamics in capacitive radio frequency discharges. Journal of Physics D: Applied Physics, 2010, 43 (12), pp.124016. ⟨10.1088/0022-3727/43/12/124016⟩. ⟨hal-00569562⟩