Dry etching of single crystal PMN-PT piezoelectric material.

Joël Agnus (1) , Ioan Alexandru Ivan (1) , Samuel Queste (1)

1 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)

During the last decade, the applications of PMN-PT spread significantly. Unlike PZT, the appropriate microtechnologies for PMN-PT Piezo-MEMS aren't fully documented in the literature. This paper deals with the PMN-PT etching by inductively coupled plasma (ICP) technique, also known as DRIE. The paper quantitatively presents the etching parameters of PMN-PT by the Ar/C4F8 gas combination and reports some related useful experience.

Domaines: Micro et nanotechnologies/Microélectronique

Joël Agnus, Ioan Alexandru Ivan, Samuel Queste. Dry etching of single crystal PMN-PT piezoelectric material.. 24th International Conference on Micro Electro Mechanical Systems, MEMS'11., Jan 2011, Cancun, Mexico. pp.237-240. ⟨hal-00566569⟩