Assembly of 3D reconfigurable hybrid MOEMS through microrobotic approach.

Kanty Rabenorosoa (1) , Sylwester Bargiel (1) , Cédric Clévy (1) , Philippe Lutz (1) , Christophe Gorecki (1)

1 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)

Micro-assembly has been identified to be a critical technology in the microsystems technology and nanotechnology. Increasing needs of MOEMS (Micro- Opto-Electro- Mechanical Systems) for microsystems conducts to development of new concepts and skilled micro-assembly stations. This paper presents a 3D microassembly station used for the reconfigurable free space micro-optical benches (RFSMOB) which are a promising type of MOEMS. Designed parts of RFS-MOB are assembled by using the developed micro-assembly station. The flexibility of the micro-assembly station provides the possibility to manipulate a variety of microcomponents. The RFS-MOB design enables to reduce adhesion forces effects during releasing operations. Experimental results are shown and validate the effectiveness of the micro-assembly station and micro-assembly strategies.

Domaines: Micro et nanotechnologies/Microélectronique

Kanty Rabenorosoa, Sylwester Bargiel, Cédric Clévy, Philippe Lutz, Christophe Gorecki. Assembly of 3D reconfigurable hybrid MOEMS through microrobotic approach.. Lecture Notes in Automation, the Edition of the Selected Papers entitled "Frontiers of Assembly and Manufacturing" Lee, Sukhan; Suárez, Raúl; Choi, Byung Wook (Eds.), 2010, pp.99-112. ⟨10.1007/978-3-642-14116-4⟩. ⟨hal-00544900⟩