%0 Conference Proceedings %T Growth of Few Graphene Layers on 6H, 4H and 3C-SiC Substrates %+ Groupe d'étude des semiconducteurs (GES) %A Camara, Nicolas %A Huntzinger, Jean-Roch %A Tiberj, Antoine %A Rius, G. %A Jouault, Benoit %A Perez-Murano, F. %A Mestres, N. %A Godignon, P. %A Camassel, Jean %< avec comité de lecture %Z GES:09-082 %( SILICON CARBIDE AND RELATED MATERIALS 2008 %( SILICON CARBIDE AND RELATED MATERIALS 2008 %B 7th European Conference on Silicon Carbide and Related Materials %C Barcelona (SPAIN), France %I TRANS TECH PUBLICATIONS LTD, LAUBLSRUTISTR 24, CH-8717 STAFA-ZURICH, SWITZERLAND %V 615-617 %P 203-206 %8 2008-09-07 %D 2008 %K epitaxial graphene %K 4H-SiC %K 6H-SiC %K 3C-SiC %K AFM %K Raman spectroscopy %K GRAPHITE %Z Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci]Conference papers %X We report a comparative investigation of Few layers graphene grown on 6H, 4H, and 3C-SiC substrates. We show that the size of the graphitic domains depends more on the < 0001 > SiC Surface orientation than the polytypism. %G English %L hal-00543294 %U https://hal.science/hal-00543294 %~ CNRS %~ UNIV-MONTP2 %~ GES %~ UNIV-MONTPELLIER %~ UM1-UM2