Nanowire-based active matrix backplanes for the control of large area X-ray imagers

Didier Pribat (1) , Costel Sorin Cojocaru (2)

1 LPICM - Laboratoire de physique des interfaces et des couches minces [Palaiseau]
2 NanoMaDe

In digital X-ray sensors, pixel complexity is limited by the instabilities of amorphous silicon transistors or by the lack of homogeneity of their polycrystalline silicon counterparts. Here, we present a novel approach to the fabrication of thin-film transistors, based on the use of silicon nanowires grown in porous alumina templates. Transistors made from silicon nanowires are essentially studied for the post-MOS era and they exhibit excellent transport characteristics. The technology we propose is simple, as it only employs chemical vapour deposition processes for transistor fabrication. Also, as far as active matrix fabrication is concerned, a small number of masks is needed and we present a 5 mask process for the fabrication of an X-ray panel with pixel amplification.

Mots clés: X-ray imagers; Nanowires; Porous anodic alumina

Domaines: Science des matériaux [cond-mat.mtrl-sci]

Didier Pribat, Costel Sorin Cojocaru. Nanowire-based active matrix backplanes for the control of large area X-ray imagers. Nuclear Instruments and Methods in Physics Research, 2006, 563, pp.82-87. ⟨10.1016/J.NIMA.2006.01.112⟩. ⟨hal-00541130⟩