Mode conversion in High overtone Bulk Acoustic wave Resonators

M. Pijolat (1) , D. Mercier (1) , A. Reinhardt (1) , E. Defaÿ (1) , C. Deguet (1) , M. Aïd (1) , J.S. Moulet (2) , B. Ghyselen (2) , S. Ballandras (3)

1 CEA-LETI - Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information
2 SOITEC
3 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)

High overtone Bulk Acoustic Resonators (HBAR) have been realized using the Smart Cut(TM) technology to transfer a thin X-cut LiNbO3 layer onto an X-cut LiNbO3 substrate. When the bonding of the two wafers is performed, an additional rotation along the normal axis is set to generate mode conversion between the two acoustic shear waves electromechanically coupled in X-cut LiNbO3. This enables excitation of only one of the two acoustic shear waves.

Domaines: Optique / photonique

M. Pijolat, D. Mercier, A. Reinhardt, E. Defaÿ, C. Deguet, et al.. Mode conversion in High overtone Bulk Acoustic wave Resonators. Joint Meeting of the 23rd European Frequency and Time Forum/IEEE International Frequency Control Symposium, Apr 2009, Besançon, France. pp.290-294, ⟨10.1109/FREQ.2009.5168188⟩. ⟨hal-00533708⟩