Fabrication and packaging technologies of Love-wave-based microbalance for fluid analysis

L. El Fissi (1) , J.-M. Friedt (1) , F. Cherioux (1) , D. Luzet (1) , S. Ballandras (1)

1 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)

Sensors able to operate with liquid phases are the key-point for the development of biochemical lab-on-chip devices. In this work, we present the design and manufacture of Love-wave sensors equipped with a liquid cell, at the wafer scale level, to allow operation with liquid media. Love-wave sensors are fabricated on AT-cut quartz plates (IEEE Std-176 notation (YXlt)/36/90) and passivated by a 2.5 mu m thick silica overlay. The fabrication process using the celebrated SU-8 epoxy-based photoresist combined with silicon or quartz machined covers is presented, revealing robust enough for ensuring a reproducible sensor fabrication and packaging. Results are reported emphasizing the efficiency of the proposed approach

Domaines: Optique / photonique

L. El Fissi, J.-M. Friedt, F. Cherioux, D. Luzet, S. Ballandras. Fabrication and packaging technologies of Love-wave-based microbalance for fluid analysis. 23rd Eurosensors Conference, Sep 2009, Lausanne, Switzerland. pp.304-309, ⟨10.1016/j.sna.2010.01.027⟩. ⟨hal-00533126⟩