Dynamic displacement self-sensing and robust control of cantilever piezoelectric actuators dedicated for microassembly.

Micky Rakotondrabe (1) , Ioan Alexandru Ivan (1) , Sofiane Khadraoui (1) , Cédric Clévy (1) , Philippe Lutz (1) , Nicolas Chaillet (1)

1 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)

The main objective of this paper is the dynamic self-sensing of the motion of piezoelectric actuators. The proposed measurement technique is afterwards used for a closed-loop control. Aiming to obtain a self-sensing scheme that estimates the transient and steady-state modes of the displacement, we extend a previous static self-sensing scheme by adding a dynamic part. Analytical solutions are provided to compute the gains of this dynamic part. Afterwards, the proposed dynamic self-sensing result is used in a closed-loop control. The experimental results demonstrate the concept and evaluate the accuracy and the efficiency of the proposed technique for closed-loop applications.

Domaines: Micro et nanotechnologies/Microélectronique

Micky Rakotondrabe, Ioan Alexandru Ivan, Sofiane Khadraoui, Cédric Clévy, Philippe Lutz, et al.. Dynamic displacement self-sensing and robust control of cantilever piezoelectric actuators dedicated for microassembly.. IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM'10., Jul 2010, Montréal, Canada. pp.557-562. ⟨hal-00504148⟩