Modular architecture of the microfactories for automatic micro-assembly.

Dominique Gendreau (1) , Michaël Gauthier (1) , David Hériban (1) , Philippe Lutz (1)

1 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)

The construction of a new generation of MEMS which includes micro-assembly steps in the current microfabrication process is a big challenge. It is necessary to develop new production means named micromanufacturing systems in order to perform these new assembly steps. The classical approach called “top-down” which consists in a functional analysis and a definition of the tasks sequences is insufficient for micromanufacturing systems. Indeed, the technical and physical constraints of the microworld (e.g. the adhesion phenomenon) must be taken into account in order to design reliable micromanufacturing systems. A new method of designing micromanufacturing systems is presented in this paper. Our approach combines the general “top-down” approach with a “bottom-up” approach which takes into account technical constraints. The method enables to build a modular architecture for micromanufacturing systems. In order to obtain this modular architecture, we have devised an original identification technique of modules and an association technique of modules. This work has been used to design the controller of an experimental robotic micro-assembly station.

Mots clés: MEMS assembly.; Micromanufacturing systems; flexibility; productivity; modularity; MEMS assembly

Domaines: Micro et nanotechnologies/Microélectronique

Dominique Gendreau, Michaël Gauthier, David Hériban, Philippe Lutz. Modular architecture of the microfactories for automatic micro-assembly.. Journal of Robotics and Computer Integrated Manufacturing., 2010, 26 (4), pp.354-360. ⟨10.1016/j.rcim.2009.11.013⟩. ⟨hal-00503826⟩