Comment on “Diagnostics of 13.56 MHz RF sustained Ar-N plasma by optical emission spectroscopy" by F.U. Khan, N.U. Rehman, S. Naseer, M.A. Naveed, A. Qayyum, N.A.D. Khattak and M. Zakaullah

N. Sadeghi (1, 2) , F.J. Gordillo-Vazquez (3)

1 LSP - Laboratoire de Spectrométrie Physique
2 LTM - Laboratoire des technologies de la microélectronique
3 IAA - Instituto de Astrofísica de Andalucía

Several important errors and misinterpretations present in a recent publication by Khan et al. [Eur. Phys. J. Appl. Phys. , 11002 (2009)] are pointed out and discussed. In particular, it is shown that the method used to calculate the rate coefficients for the electron impact excitation of 34 and 35 states of argon is incorrect and leads to unrealistically high rate coefficients.

Mots clés: Physical Sciences

N. Sadeghi, F.J. Gordillo-Vazquez. Comment on “Diagnostics of 13.56 MHz RF sustained Ar-N plasma by optical emission spectroscopy" by F.U. Khan, N.U. Rehman, S. Naseer, M.A. Naveed, A. Qayyum, N.A.D. Khattak and M. Zakaullah. European Physical Journal: Applied Physics, 2009, 47 (1), pp.1-3. ⟨10.1051/epjap/2009104⟩. ⟨hal-00489490⟩