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| HAL: hal-00487498, version 1 |
| Detailed view |  Export this paper |
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| IEEE/ASME Journal of Microelectromechanical Systems 19 (2010) 1015-1017 |
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| Thermal excitation and piezoresistive detection of cantilever in-plane resonance modes for sensing applications |
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| L. Beardslee 1A.M. Addous 1 |
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| (2010) |
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| 1: | School of Electrical and Computer Engineering - Georgia Insitute of Technology (ECE GeorgiaTech) |
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Georgia Institute of Technology |
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| 2: | Department of Civil and Environmental Engineering |
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Marquette University |
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| 3: | Department of Electrical and Computer Engineering |
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Marquette University |
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| 4: | Laboratoire de l'intégration, du matériau au système (IMS) |
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CNRS : UMR5218 – Université Sciences et Technologies - Bordeaux I – Ecole Nationale Supérieure d'Electronique, Informatique et Radiocommunications de Bordeaux – École Nationale Supérieure de Chimie et de Physique de Bordeaux |
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| Subject | : | Engineering Sciences/Micro and nanotechnologies/Microelectronics |
| hal-00487498, version 1 | |
| http://hal.archives-ouvertes.fr/hal-00487498 | |
| oai:hal.archives-ouvertes.fr:hal-00487498 | |
| From: Isabelle Dufour | |
| Submitted on: Saturday, 29 May 2010 14:33:08 | |
| Updated on: Monday, 30 August 2010 22:38:29 | |
