Semi-analytical Magnetic-Structural coupling with contact analysis for MEMS/NEMS

Phuong Pham Quang (1, 2) , Benoît Delinchant (1) , Jean-Louis Coulomb (1) , Bertrand Du Peloux (2)

1 G2ELab - Laboratoire de Génie Electrique de Grenoble
2 Cedrat

This paper presents a methodology and a tool for the coupled magnetic-structural with semi-analytical models. For this coupling, the magnetic model is available; we developed the structural-contact model for the cantilever beam and validate it by finite element simulation. This coupling is dedicated to the optimization process of MEMS/NEMS in general and to magnetic nano switch in particular.

Domaines: Energie électrique

Phuong Pham Quang, Benoît Delinchant, Jean-Louis Coulomb, Bertrand Du Peloux. Semi-analytical Magnetic-Structural coupling with contact analysis for MEMS/NEMS. CEFC 2010 (Conference on Electromagnetic Field Computation), May 2010, Chicago, United States. ⟨hal-00484915⟩