Development, modelling and control of a micro/nano positioning 2DoF stick-slip device.

Micky Rakotondrabe (1) , Yassine Haddab (1) , Philippe Lutz (1)

1 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)

The works presented in this article are motivated by the high performances required in micromanipulation/ microassembly tasks. For that, this paper presents the developement, the modelling and the control of a 2 degrees of freedom (in linear and angular motion) micropositioning device. Based on the stick-slip motion principle, the device is characterized by unlimited strokes and submicrometric resolutions. First, experiments were carried out to characterize the performances of the micropositioning device in resolution and in speed. After that, a state-space model was developed for the sub-step functioning. Such functioning is interesting for a highly accurate task like nanopositioning. The model is validated experimentally. Finally, a controller was designed and applied to the micropositioning device. The results show good robustness margins and a response time of the closed-loop system.

Mots clés: positioning control; Micropositioning device; stick-slip; linear and angular motion; state-space modelling; positioning control.

Domaines: Micro et nanotechnologies/Microélectronique

Micky Rakotondrabe, Yassine Haddab, Philippe Lutz. Development, modelling and control of a micro/nano positioning 2DoF stick-slip device.. IEEE/ASME Transactions on Mechatronics, 2009, 14 (6), pp.733-745. ⟨10.1109/TMECH.2009.2011134⟩. ⟨hal-00436590⟩