%0 Journal Article
%T Thermal and Mechanical Properties of Silicon Tetrachloride (SiCl4) and Germanium Tetrachloride (GeCl4) in Their Vapor and Liquid Phases
%+ Groupe d'étude des semiconducteurs (GES)
%A Prat, Olivier P.
%A Cloitre, Thierry
%A Aulombard, Roger-Louis
%< avec comité de lecture
%J Chem. Vap. Deposition
%V 13
%P 199
%8 2007
%D 2007
%Z Physics [physics]/Physics [physics]/Biological Physics [physics.bio-ph]Journal articles
%X The two chemical species SiCl4 and GeCl4 are used, to a large extent, as starting materials in the optical fiber and semiconductor industry. The knowledge of selected physical properties of these materials (e.g. vapor pressure, viscosity, thermal conductivity, heat of vaporization, and heat capacity among others) is required for the prediction of their evaporation and deposition processes. While some of the aforementioned properties are well documented in the literature, others are seldom found or incomplete and only available for fixed temperatures. The aim of this paper is to gather the most common physical and mechanical properties for both SiCl4 and GeCl4 in their liquid and vapor phases.
%G English
%L hal-00414666
%U https://hal.science/hal-00414666
%~ CNRS
%~ UNIV-MONTP2
%~ GES
%~ UNIV-MONTPELLIER
%~ UM1-UM2