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| HAL: hal-00401519, version 1 |
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| European Symposium on Reliability of Electron Devices, Failure Physics and analysis (ESREF), wuppertal : Germany (2006) |
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| Applications of various optical techniques for ESD defect localization |
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| Fabien Essely 1Frédéric Darracq 1 |
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| (2006) |
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| 1: | Laboratoire de l'intégration, du matériau au système (IMS) |
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CNRS : UMR5218 – Université Sciences et Technologies - Bordeaux I – Institut Polytechnique de Bordeaux |
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| 2: | Centre National d'Etudes Spatiales (CNES) |
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CNES |
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| 3: | Laboratoire d'analyse et d'architecture des systèmes (LAAS) |
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CNRS : UPR8001 – Université Paul Sabatier [UPS] - Toulouse III – Institut National Polytechnique de Toulouse - INPT – Institut National des Sciences Appliquées (INSA) - Toulouse |
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| Subject | : | Engineering Sciences/Electronics |
| hal-00401519, version 1 | |
| http://hal.archives-ouvertes.fr/hal-00401519 | |
| oai:hal.archives-ouvertes.fr:hal-00401519 | |
| From: Frédéric Darracq | |
| Submitted on: Friday, 3 July 2009 12:02:38 | |
| Updated on: Friday, 3 July 2009 12:02:38 | |
