%0 Conference Paper
%F Oral 
%T Calibration of the PEC Etching Method of GaN
%+ Groupe d'étude des semiconducteurs (GES)
%+ Institute of High Pressure Physics [Warsaw] (IHPP)
%+ Leibniz-Institut für Kristallzüchtung
%A Lewandowska, Renata
%A Weyher, J.L.
%A Albrecht, M.
%A Konczewicz, Leszek
%A Łucznik, Bolesław
%< avec comité de lecture
%B EXMATEC
%C Cadiz, Spain
%8 2006-05-14
%D 2006
%Z Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci]Conference papers
%G English
%L hal-00401351
%U https://hal.science/hal-00401351
%~ CNRS
%~ UNIV-MONTP2
%~ GES
%~ UNIV-MONTPELLIER
%~ UM1-UM2