Effect of the annealing process on the microstructure of La2Zr2O7 thin layers epitaxially grown on LaAlO3 by metalorganic decomposition - Archive ouverte HAL Accéder directement au contenu
Article Dans Une Revue Journal of Crystal Growth Année : 2009

Effect of the annealing process on the microstructure of La2Zr2O7 thin layers epitaxially grown on LaAlO3 by metalorganic decomposition

Résumé

La2Zr2O7 (LZO) films have been grown by Metalorganic Decomposition (MOD) to be used as buffer layers for coated conductors. A characteristic feature of LZO thin films deposited by MOD is the formation of nanovoids in an almost single crystal structure of LZO pyrochlore phase. Annealing parameters (heating ramp, temperature, pressure...) were varied to establish their influence on the microstructure of the LZO layers. XRD and TEM were used for sample characterisation. The epitaxial pyrochlore phase was obtained for annealing temperatures higher that 850°C whatever the other annealing conditions. However, the film microstructure, in particular, nanovoids shape and size, is strongly dependent on heating ramp and pressure during annealing. When using low heating ramp, percolation of voids creates diffusion channels for oxygen which are detrimental for the substrate protection during coated conductor fabrication. From this point of view high heating rates are more adapted to the growth of LZO layers.
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Dates et versions

hal-00395314 , version 1 (15-06-2009)

Identifiants

Citer

Carmen Jiménez, Tristan Caroff, L. Rapenne, Stéphanie Morlens, Elena Santos, et al.. Effect of the annealing process on the microstructure of La2Zr2O7 thin layers epitaxially grown on LaAlO3 by metalorganic decomposition. Journal of Crystal Growth, 2009, 311, pp.3204. ⟨10.1016/j.jcrysgro.2009.03.021⟩. ⟨hal-00395314⟩

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