MEMS fabrication at CMP: past and present

Bernard Courtois (1) , Gregory Di Pendina (1) , Kholdoun Torki (1)

1 CMP - Circuits Multi-Projets

Infrastructures to provide access to custom integrated hardware manufacturing facilities are important because they allow Students and Researchers to access professional facilities at a reasonable cost, and they allow Companies to access small volume production, otherwise difficult to obtain directly from manufacturers. This paper is reviewing the developments at CMP to offer various types of MEMS manufacturing to Students, Researchers and Companies since 1994. CMP has been the first service of its type to introduce MEMS fabrication. Today CMP is offering bulk micromachining on CMOS and GaAs, and various MEMS processes. CAD tools provided by CMP are also reviewed.

Mots clés: MEMS

Domaines: Micro et nanotechnologies/Microélectronique

Bernard Courtois, Gregory Di Pendina, Kholdoun Torki. MEMS fabrication at CMP: past and present. Nova Science Publishers, Inc. MEMS: Technology, Fabrication Processes and Applications, Nova Science Publishers, Inc., 2009. ⟨hal-00395259⟩