%0 Conference Proceedings
%T Visible light laser irradiation: A tool for implantation damage reduction
%+ Groupe d'étude des semiconducteurs (GES)
%+ University of Pretoria [South Africa]
%+ Institut de Ciència de Materials de Barcelona (ICMAB)
%+ Centre Nacional de Microelectrònica (CNM)
%A Camassel, Jean
%A Peyre, Hervé
%A Brink, D. J.
%A Zielinski, Marcin
%A Blanqué, Servane
%A Mestres, N.
%A Godignon, Philippe
%< avec comité de lecture
%( Materials science forum
%B 10th International Conference on Silicon Carbide and Related Materials (ICSCRM2003)
%C Lyon, France
%I Trans Tech Publications, Switzerland
%V 457-460
%P 941-944
%8 2003-10-05
%D 2003
%Z Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci]Conference papers
%G English
%L hal-00389896
%U https://hal.science/hal-00389896
%~ CNRS
%~ UNIV-MONTP2
%~ GES
%~ UNIV-MONTPELLIER
%~ UM1-UM2