%0 Conference Proceedings
%T Improved SiCOI Structures Elaborated by Heteroepitaxy of 3C-SiC on SOI
%+ Laboratoire des Multimatériaux et Interfaces (LMI)
%+ Groupe d'étude des semiconducteurs (GES)
%+ Department of Physics [Thessaloniki]
%+ SOITEC SA
%A Chassagne, Thierry
%A Ferro, Gabriel
%A Wang, H. Y.
%A Stoemenos, Yanis
%A Peyre, Hervé
%A Contreras, Sylvie
%A Camassel, Jean
%A Monteil, Yves
%A Ghyselen, B.
%< avec comité de lecture
%( Materials Science Forum
%B International Conference on Silicon and Carbide and Related Materials 2001 (9th) (ICSCRM2001)
%C Tsukuba, Japan
%I Trans Tech Publications, Switzerland
%V 389-393
%P 343-346
%8 2001-10-28
%D 2001
%K Chemical Vapor Deposition CVD
%K Heteroepitaxy
%K SiCOI
%K SOI
%Z Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci]Conference papers
%G English
%L hal-00389892
%U https://hal.science/hal-00389892
%~ CNRS
%~ UNIV-LYON1
%~ UNIV-MONTP2
%~ GES
%~ LMI
%~ UNIV-MONTPELLIER
%~ UDL
%~ UNIV-LYON
%~ UM1-UM2
%~ TEST2-HALCNRS