Design, development and experiments of a high stroke-precision 2DoF (linear-angular) microsystem

Micky Rakotondrabe (1) , Yassine Haddab (1) , Philippe Lutz (1)

1 LAB - Laboratoire d'automatique de Besançon

This paper presents the design, the development and the experiments on a two degrees of freedom (2DoF) microsystem. The originality of the microsystem is its ability to do angular and linear motions independently with a very high stroke and a submicrometric precision. The target performances are first presented. Afterwards the stick-slip piezoelectric microactuators that are used are presented. Then, their integration inside the microsystem is detailed. Finally, results of experiments are given.

Mots clés: stick-slip; Micromanipulation system; angular and linear motions; piezoelectric actuator; design and development

Domaines: Micro et nanotechnologies/Microélectronique

Micky Rakotondrabe, Yassine Haddab, Philippe Lutz. Design, development and experiments of a high stroke-precision 2DoF (linear-angular) microsystem. International Conference on Robotics and Automation (ICRA), May 2006, Orlando, FL, United States. pp.669-674, ⟨10.1109/ROBOT.2006.1641787⟩. ⟨hal-00331507⟩