Dust cloud dynamics during particle successive generations

Marjorie Cavarroc (1) , Maxime Mikikian (1) , Yves Tessier (1) , Laïfa Boufendi (1)

1 GREMI - Groupe de recherches sur l'énergétique des milieux ionisés

Silane-based plasmas are widely used to deposit nanostructured silicon thin films or to synthesize silicon nanoparticles. Dust particle formation in Ar/SiH4 plasmas is a continuous phenomenon: as long as silane precursors are provided, new dust generations are formed. Successive generations can be monitored thanks to various electrical (Vdc/3H) and optical (OES, video imaging) diagnostics. Experiments presented in this paper have been performed in a capacitively-coupled radiofrequency discharge, at low pressure (12 Pa) in an Argon/Silane mixture (92:8).

Mots clés: Silane; Dust particle; Radiofrequency

Domaines: Plasmas; Physique des plasmas [physics.plasm-ph]

Marjorie Cavarroc, Maxime Mikikian, Yves Tessier, Laïfa Boufendi. Dust cloud dynamics during particle successive generations. 34th European Physical Society Conference on Plasma Physics, Jul 2007, Varsovie, Poland. pp.P-5.045. ⟨hal-00331242⟩