Practical characterisation of the friction force for the positioning and orientation of Micro-Components.

Mickaël Paris (1) , Yassine Haddab (1) , Philippe Lutz (1) , Patrick Rougeot (1)

1 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)

This paper deals with the description of a method for the measurement of friction force between a very small object (80 to 300 μm) and a support. The goal is to design a feeder based on controlled mechanical vibrations in order to drive microcomponents by breaking the friction force. The contact model is based on the Hertz theory and the Greenwood- Williamson multi-asperity model. The amplitude of the static friction force is measured in a clean environment with an AFM (Atomic Force Microscope) whose cantilever is placed in the vertical position. Using this setup and the modeling, we have estimated the interfacial shear stress between the microcomponent and the support.

Domaines: Micro et nanotechnologies/Microélectronique

Mickaël Paris, Yassine Haddab, Philippe Lutz, Patrick Rougeot. Practical characterisation of the friction force for the positioning and orientation of Micro-Components.. IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS'08., Sep 2008, Nice, France. pp.931-936. ⟨hal-00325167⟩