Electron Beam Charging of Insulators with Surface Layer and Leakage Currents

Nadège Cornet (1, 2) , Dominique Gœuriot (1, 2) , Christelle Guerret-Piecourt (3) , Denyse Juvé (3) , Daniel Tréheux (3) , Matthieu Touzin (4) , Hans-Joachim Fitting (5)

1 MPE-ENSMSE - Département Mécanique et Procédés d'Elaboration
2 PECM-ENSMSE - Plasticité, Endommagement et Corrosion des Matériaux
3 LTDS - Laboratoire de Tribologie et Dynamique des Systèmes
4 LSPES - Laboratoire de structures et propriétés de l'état solide - UMR 8008
5 University of Rostock

The electron beam induced selfconsistent charge transport in layered insulators is described by means of an electron-hole fight-drift model FDM and an iterative computer simulation. Ballistic secondary electrons and holes, their attenuation and drift, as well as their recombination, trapping, and detrapping are included. Thermal and field-enhanced detrapping are described by the Poole-Frenkel effect. Furthermore, an additional surface layer with a modified electric surface conductivity is included which describes the surface leakage currents and will lead to particular charge incorporation at the interface between the surface layer and the bulk substrate.

Mots clés: electron-hole recombination; hole traps; leakage currents; Poole-Frenkel effect; secondary electron emission; silicon compounds; surface conductivity; charge storage; trapping; insulators; multi-layer; charge injection; alumina; ballistic transport; electron beam effects; electron traps

Domaines: Science des matériaux [cond-mat.mtrl-sci]; Matériaux

Nadège Cornet, Dominique Gœuriot, Christelle Guerret-Piecourt, Denyse Juvé, Daniel Tréheux, et al.. Electron Beam Charging of Insulators with Surface Layer and Leakage Currents. Journal of Applied Physics, 2008, 103 (6), pp.064110. ⟨10.1063/1.2890427⟩. ⟨hal-00281702⟩