Sub-µ structured Lotus Surfaces Manufacturing

M. Worgull (1) , M. Heckele (1) , T. Mappes (2) , B. Matthis (1) , G. Tosello (3) , T. Metz (4) , J. Gavillet (5) , P. Koltay (4) , H. N. Hansen (3)

1 Institut für Mikrostrkturtechnic
2 Institute for Microstructure Technology (IMT)
3 Department of Mechanical Engineering (MEK)
4 IMTEK - Department of Microsystems Engineering [Freiburg]
5 CEA-LETI - Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information

Sub-micro structured surfaces allow modifying the behavior of polymer films or components. Especially in micro fluidics a lotus-like characteristic is requested for many applications. Structure details with a high aspect ratio are necessary to decouple the bottom and the top of the functional layer. Unlike to stochastic methods, patterning with a LIGA-mold insert it is possible to structure surfaces very uniformly or even with controlled variations (e.g. with gradients). In this paper we present the process chain to realize polymer sub-micro structures with minimum lateral feature size of 400 nm and up to 4 μm high.

Domaines: Autre [cs.OH]

M. Worgull, M. Heckele, T. Mappes, B. Matthis, G. Tosello, et al.. Sub-µ structured Lotus Surfaces Manufacturing. DTIP 2008, Apr 2008, Nice, France. pp.330-334. ⟨hal-00277753⟩