Micro-tensile tests on micromachined metal on polymer specimens: elasticity, plasticity and rupture - Archive ouverte HAL Accéder directement au contenu
Communication Dans Un Congrès Année : 2008

Micro-tensile tests on micromachined metal on polymer specimens: elasticity, plasticity and rupture

Résumé

This study is focused on the mechanical characterization of materials used in microelectronic and micro- electromechanical systems (MEMS) devices. In order to determine their mechanical parameters, a new deformation bench test with suitable micromachined specimens have been developed. Uniaxial tensile tests were performed on “low cost” specimens, consisting in electroplated thin copper films and structures, deposited on a polimide type substrate. Moreover, a cyclic mechanical actuation via piezoelectric actuators was tested on the same deformation bench. These experiments validate the device for performing dynamic characterization of materials, and reliability studies of different microstructures.

Domaines

Autre [cs.OH]
Fichier principal
Vignette du fichier
dtip08008.pdf (979.38 Ko) Télécharger le fichier
Origine : Fichiers produits par l'(les) auteur(s)
Loading...

Dates et versions

hal-00277669 , version 1 (07-05-2008)

Identifiants

Citer

C. Seguineau, M. Ignat, C. Malhaire, S. Brida, X. Lafontan, et al.. Micro-tensile tests on micromachined metal on polymer specimens: elasticity, plasticity and rupture. DTIP 2008, Apr 2008, Nice, France. pp.8-10. ⟨hal-00277669⟩
196 Consultations
144 Téléchargements

Altmetric

Partager

Gmail Facebook X LinkedIn More