On-chip thermal calibration with 8 CB liquid crystal of micro-thermal device

Frédéric Gillot (1) , Hideyuki F. Arata (1) , Régis Guégan (1, 2) , Fabrice O. Morin (1) , Hajime Tanaka (1) , Hiroyuki Fujita (1)

1 GMCM - Groupe matière condensée et matériaux
2 ISTO - Institut des Sciences de la Terre d'Orléans

A micro sensor integrated on a micro-thermal device for bioexperiments requires affordable, rapid and accurate thermal 10 calibration. However, there has been no way to make thermal calibration directly under the microscope. This was the limitations in making numbers of bioexperiments with micro thermal devices. We present in this paper an inexpensive, fast and accurate way to realise such thermal calibration directly 15 under the microscope. We used a thermotropic liquid crystal: the 4-n-octyl-4-cyanobiphenyl（8CB） in order to reach the 313 K isothermal phase change on the device. Coupled with FEA simulations, we proved that this method enables us to make easy and accurate thermal calibration of micro-thermal device for 20 biological application.

Mots clés: temperature sensor; micro device; liquid crystal; thermal calibration

Domaines: Micro et nanotechnologies/Microélectronique

Frédéric Gillot, Hideyuki F. Arata, Régis Guégan, Fabrice O. Morin, Hajime Tanaka, et al.. On-chip thermal calibration with 8 CB liquid crystal of micro-thermal device. Lab on a Chip, 2007, 7, pp.1600. ⟨10.1039/b709317a⟩. ⟨hal-00264795⟩