DEVELOPMENT AND APPLICATION OF A DIAPHRAGM MICRO-PUMP WITH PIEZOELECTRIC DEVICE

H.K. Ma (1) , B.R. Hou (1) , H.Y. Wu (1) , C.Y. Lin (1) , J.J. Gao (1) , M.C. Kou (1)

1 Department of Mechanical Engineering

In this study, a new type of thin, compact, and light weighed diaphragm micro-pump has been successfully developed to actuate the liquid by the vibration of a diaphragm. The micro-diaphragm pump with two valves is fabricated in an aluminum case by using highly accurate CNC machine, and the cross-section dimension is 5mm x 8mm. Both valves and diaphragm are manufactured from PDMS. The amplitude of vibration by a piezoelectric device produces an oscillating flow which may change the chamber volume by changing the curvature of a diaphragm. Several experimental set-ups for performance test in a single micro-diaphragm pump, isothermal flow open system, and a closed liquid cooling system is designed and implemented. The performance of one-side actuating micro-diaphragm pump is affected by the design of check valves, diaphragm, piezoelectric device, chamber volume, input voltage and frequency. The measured maximum flow rate of present design is 72 ml/min at zero total pump head in the range of operation frequency 70-180 Hz.

Mots clés: Sensors & device

Domaines: Autre [cs.OH]; Architectures Matérielles [cs.AR]

H.K. Ma, B.R. Hou, H.Y. Wu, C.Y. Lin, J.J. Gao, et al.. DEVELOPMENT AND APPLICATION OF A DIAPHRAGM MICRO-PUMP WITH PIEZOELECTRIC DEVICE. DTIP 2007, Apr 2007, Stresa, lago Maggiore, Italy. pp.273-278. ⟨hal-00257702⟩