MEMS Q-FACTOR ENHANCEMENT USING PARAMETRIC AMPLIFICATION: THEORETICAL STUDY AND DESIGN OF A PARAMETRIC DEVICE

L. Grasser (1) , H. Mathias (1) , F. Parrain (1) , Xavier Le Roux (1) , J.-P. Gilles (1)

1 IEF - Institut d'électronique fondamentale

Parametric amplification is an interesting way of artificially increasing a MEMS Quality factor and could be helpful in many kinds of applications. This paper presents a theoretical study of this principle, based on Matlab/Simulink® simulations, and proposes design guidelines for parametric structures. A new device designed with this approach is presented together with the corresponding FEM simulation results.

Mots clés: Design and test techniques for MEMS

Domaines: Autre [cs.OH]; Architectures Matérielles [cs.AR]

L. Grasser, H. Mathias, F. Parrain, Xavier Le Roux, J.-P. Gilles. MEMS Q-FACTOR ENHANCEMENT USING PARAMETRIC AMPLIFICATION: THEORETICAL STUDY AND DESIGN OF A PARAMETRIC DEVICE. DTIP 2007, Apr 2007, Stresa, lago Maggiore, Italy. pp.255-259. ⟨hal-00257698⟩