IDENTIFICATION OF TEST STRUCTURES FOR REDUCED ORDER MODELING OF THE SQUEEZE FILM DAMPING IN MEMS

A. Soma (1) , G. de Pasquale

1 Department of Mechanics

In this study the dynamic behaviour of perforated microplates oscillating under the effect of squeeze film damping is analyzed. A numerical approach is adopted to predict the effects of damping and stiffness transferred from the surrounding ambient air to oscillating structures ; the effect of hole's cross section and plate's extension is observed. Results obtained by F.E.M. models are compared with experimental measurements performed by an optical interferometric microscope.

Mots clés: Design and test techniques for MEMS

Domaines: Autre [cs.OH]; Architectures Matérielles [cs.AR]

A. Soma, G. de Pasquale. IDENTIFICATION OF TEST STRUCTURES FOR REDUCED ORDER MODELING OF THE SQUEEZE FILM DAMPING IN MEMS. DTIP 2007, Apr 2007, Stresa, lago Maggiore, Italy. pp.230-239. ⟨hal-00257694⟩