Parameter Identification of Pressure Sensors by Static and Dynamic Measurements

S. Michael (1) , S. Kurth (2) , J. Klattenhoff (3) , H. Geissler (4) , S. Hering (5)

1 Melexis GmbH
2 Fraunhofer IZM - Fraunhofer Institute for Reliability and Microintegration
3 Polytec GmbH [Waldbronn]
4 SUSS MicroTec Testsystems GmbH, Sacka
5 X-FAB Seminconductor Foundries AG, Erfurt

Fast identification methods of pressure sensors are investigated. With regard to a complete accurate sensor parameter identification two different measurement methods are combined. The approach consists on one hand in performing static measurements - an applied pressure results in a membrane deformation measured interferometrically and the corresponding output voltage. On the other hand optical measurements of the modal responses of the sensor membranes are performed. This information is used in an inverse identification algorithm to identify geometrical and material parameters based on a FE model. The number of parameters to be identified is thereby generally limited only by the number of measurable modal frequencies. A quantitative evaluation of the identification results permits furthermore the classification of processing errors like etching errors. Algorithms and identification results for membrane thickness, intrinsic stress and output voltage will be discussed in this contribution on the basis of the parameter identification of relative pressure sensors.

Mots clés: Mechanical simulation of beams and sensors

Domaines: Autre [cs.OH]; Architectures Matérielles [cs.AR]

S. Michael, S. Kurth, J. Klattenhoff, H. Geissler, S. Hering. Parameter Identification of Pressure Sensors by Static and Dynamic Measurements. DTIP 2007, Apr 2007, Stresa, lago Maggiore, Italy. pp.209-214. ⟨hal-00257690⟩