Design and Modeling of Micromechanical GaAs based Hot Plate for Gas Sensors

J. Jakovenko (1) , M. Husak (1) , T. Lalinskytfh (2) , M. Drzik (3) , G. Vanko (2)

1 Dept. of Microelectronics
2 Institute of Electrical Engineering
3 International Laser Center

For modern Gas sensors, high sensitivity and low power are expected. This paper discusses design, simulation and fabrication of new Micromachined Thermal Converters (MTCs) based on GaAs developed for Gas sensors. Metal oxide gas sensors generally work in high temperature mode that is required for chemical reactions to be performed between molecules of the specified gas and the surface of sensing material. There is a low power consumption required to obtain the operation temperatures in the range of 200 to 500 oC. High thermal isolation of these devices solves consumption problem and can be made by designing of free standing micromechanical hot plates. Mechanical stability and a fast thermal response are especially significant parameters that can not be neglected. These characteristics can be achieved with new concept of GaAs thermal converter.

Mots clés: Modeling; simulation and CAD for MEMS

Domaines: Autre [cs.OH]; Architectures Matérielles [cs.AR]

J. Jakovenko, M. Husak, T. Lalinskytfh, M. Drzik, G. Vanko. Design and Modeling of Micromechanical GaAs based Hot Plate for Gas Sensors. DTIP 2007, Apr 2007, Stresa, lago Maggiore, Italy. pp.147-150. ⟨hal-00257678⟩