Modeling of T-Shaped Microcantilever Resonators

M. Narducci (1) , E. Figueras (1) , I. Gracia (1) , L. Fonseca (1) , J. Santander (1) , C. Cané (1)

1 CNM - Centro Nacional de Microelectronica [Spain]

The extensive research and development of micromechanical resonators is trying to allow the use of these devices for highly sensitive applications. Microcantilevers are some of the simplest MEMS structure and had been proved to be a good platform due to its excellent mechanical properties. A cantilever working in dynamic mode, adjust its resonance frequency depending on changes in both the spring constant (k) and mass (m) of the resonator. The aim of this work was to model a cantilever structure to determine the optimal dimensions in which the resonance frequency would be a function dominated by mass changes and not stiffness changes. In order to validate the model a set of microcantilevers were fabricated and characterized.

Domaines: Autre [cs.OH]; Architectures Matérielles [cs.AR]

M. Narducci, E. Figueras, I. Gracia, L. Fonseca, J. Santander, et al.. Modeling of T-Shaped Microcantilever Resonators. DTIP 2007, Apr 2007, Stresa, lago Maggiore, Italy. pp.100-105. ⟨hal-00257670⟩