A Reconfigurable Impedance Matching Network Employing RF-MEMS Switches

M. Bedani (1) , F. Carozza (1) , R. Gaddi (1) , A. Gnudi (1) , B. Margesin (2) , F. Giacomozzi (2)

1 ARCES - Advanced Research Center on Electronic Systems for Information and Communication Technologies E. De Castro [Bologna]
2 FBK - Fondazione Bruno Kessler [Trento, Italy]

We propose the design of a reconfigurable impedance matching network for the lower RF frequency band, based on a developed RF-MEMS technology. The circuit is composed of RF-MEMS ohmic relays, metal-insulator-metal (MIM) capacitors and suspended spiral inductors, all integrated on a high resistivity Silicon substrate. The presented circuit is well-suited for all applications requiring adaptive impedance matching between two in principle unknown cascaded RF-circuits. The fabrication and testing of a monolithic integrated prototype in RF-MEMS technology from ITC-irst is currently underway.

Domaines: Autre [cs.OH]; Architectures Matérielles [cs.AR]

M. Bedani, F. Carozza, R. Gaddi, A. Gnudi, B. Margesin, et al.. A Reconfigurable Impedance Matching Network Employing RF-MEMS Switches. DTIP 2007, Apr 2007, Stresa, lago Maggiore, Italy. pp.11-15. ⟨hal-00257653⟩