ARCHITECTURE FOR INTEGRATED MEMS RESONATORS QUALITY FACTOR MEASUREMENT

H. Mathias (1) , F. Parrain (1) , J.-P. Gilles (1) , S. Megherbi (1) , M. Zhang (1) , Ph. Coste (1) , A. Dupret (1)

1 IEF - Institut d'électronique fondamentale

In this paper, an architecture designed for electrical measurement of the quality factor of MEMS resonators is proposed. An estimation of the measurement performance is made using PSPICE simulations taking into account the component's non-idealities. An error on the measured Q value of only several percent is achievable, at a small integration cost, for sufficiently high quality factor values (Q > 100).

Domaines: Autre [cs.OH]; Architectures Matérielles [cs.AR]

H. Mathias, F. Parrain, J.-P. Gilles, S. Megherbi, M. Zhang, et al.. ARCHITECTURE FOR INTEGRATED MEMS RESONATORS QUALITY FACTOR MEASUREMENT. DTIP 2007, Apr 2007, Stresa, lago Maggiore, Italy. pp.6-10. ⟨hal-00257651⟩