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THERMINIC 2005, Belgirate, Lago Maggiore : Italie (2005)

Qualitative Temperature Variation Imaging by Thermoreflectance and SThM Techniques

S. Null Grauby 1, A. Salhi 1, S. Dilhaire 1, L.D. Patino Lopez 1, B. Charlot 2, W. Claeys 1, B. Cretin 3, G. Tessier 3, N. Trannoy 3, P. Vairac 3, S. Volz 3

(09/2005)

We have studied temperature variations on two dissipative structures with two different techniques. The dissipative structures are constituted of thin (0.35µm) dissipative resistors, the distance between two resistors being equal to 0.8 or 10 µm. On one hand, we have used a thermoreflectance imaging technique which is a well-known non contact optical method to evaluate temperature variations but whose spatial resolution is limited by diffraction. On the other hand, we have used a Scanning Thermal Microscope (SThM) to study the thermal behaviour of these small dissipative structures. We compare qualitative results obtained by both methods and we present their advantages and limitations for temperature measurements on microelectronic devices.

1 :	Centre de physique moléculaire optique et hertzienne (CPMOH)
	CNRS : UMR5798 – Université Sciences et Technologies - Bordeaux I
2 :	Techniques of Informatics and Microelectronics for integrated systems Architecture (TIMA)
	CNRS : UMR5159 – Université Joseph Fourier - Grenoble I – Institut National Polytechnique de Grenoble (INPG)
3 :	Micro et nanothermique (MN)
	ENSMA – ESPCI ParisTech – CEA – DGA – Université Sciences et Technologies - Bordeaux I – Université Pierre et Marie Curie [UPMC] - Paris VI – Université de Nantes – Université de Franche-Comté – Ecole Centrale Paris

Domaine

:

Informatique/Architecture

Mots Clés : Thermal imaging – spatial resolution – scanning thermal microscopy

hal-00189487, version 1

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Soumis le : Mercredi 21 Novembre 2007, 09:13:09

Dernière modification le : Mercredi 21 Novembre 2007, 15:17:54