Determination of Thermophysical Properties of Si/SiGe Superlattices with a Pump-Probe Technique

Y. Ezzahri (1) , Stéphane Grauby (1) , S. Dilhaire (1) , Jean-Michel Rampnoux (1) , W. Claeys (1) , Y. Zhang (2) , A. Shakouri (2)

1 CPMOH - Centre de physique moléculaire optique et hertzienne
2 UCSC - Jack Baskin School of Engineering

A Time Domain Thermo-Reflectance technique (TDTR) is used for the non-destructive evaluation of thermal and acoustic properties of Si/SiGe superlattices (SL) at room temperature. In particular, this technique allows the determination of the SL cross-plan thermal conductivity, the thermal boundary resistance at the interface between the metallic film and the SL, and the longitudinal sound velocity inside the SL. We discuss the effect of both transducer thickness and pump power on the measurements and then on values of the extracted thermophysical properties of the superlattice.

Mots clés: Superlattice; thermal properties; thermal modeling; pump probe femtosecond technique; thermoreflectance

Domaines: Architectures Matérielles [cs.AR]

Y. Ezzahri, Stéphane Grauby, S. Dilhaire, Jean-Michel Rampnoux, W. Claeys, et al.. Determination of Thermophysical Properties of Si/SiGe Superlattices with a Pump-Probe Technique. THERMINIC 2005, Sep 2005, Belgirate, Lago Maggiore, Italy. pp.235-243. ⟨hal-00189478⟩