RECENT DEVELOPMENTS IN MEMS-BASED MICRO FUEL CELLS

T. Pichonat (1) , B. Gauthier-Manuel (1)

1 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)

Micro fuel cells (µ-FC) represent promising power sources for portable applications. Today, one of the technological ways to make µ-FC is to have recourse to standard microfabrication techniques used in the fabrication of micro electromechanical systems (MEMS). This paper shows an overview on the applications of MEMS techniques on miniature FC by presenting several solutions developed throughout the world. It also describes the latest developments of a new porous silicon-based miniature fuel cell. Using a silane grafted on an inorganic porous media as the proton-exchange membrane instead of a common ionomer such as Nafion, the fuel cell achieved a maximum power density of 58 mW cm-2 at room temperature with hydrogen as fuel.

Mots clés: Modeling and simulation of fabrication processes; Process integration between MEMS and electronic

Domaines: Architectures Matérielles [cs.AR]

T. Pichonat, B. Gauthier-Manuel. RECENT DEVELOPMENTS IN MEMS-BASED MICRO FUEL CELLS. DTIP 2006, Apr 2006, Stresa, Lago Maggiore, Italy. 6 p. ⟨hal-00189312⟩