POWER PROCESSING CIRCUITS FOR MEMS INERTIAL ENERGY SCAVENGERS

P.-D. Mitcheson (1) , T.-C. Green (1) , E.-M. Yeatman (1)

1 DEEE - Department of Electrical and Electronic Engineering [London]

Inertial energy scavengers are self-contained devices which generate power from ambient motion, by electrically damping the internal motion of a suspended proof mass. There are significant challenges in converting the power generated from such devices to useable form, particularly in micro-engineered variants. This paper presents approaches to this power conversion requirement, with emphasis on the cases of electromagnetic and electrostatic transduction.

Mots clés: Modeling and simulation of fabrication processes Process integration between MEMS and electronics

Domaines: Architectures Matérielles [cs.AR]

P.-D. Mitcheson, T.-C. Green, E.-M. Yeatman. POWER PROCESSING CIRCUITS FOR MEMS INERTIAL ENERGY SCAVENGERS. DTIP 2006, Apr 2006, Stresa, Lago Maggiore, Italy. 6 p. ⟨hal-00189304⟩