DESIGN AND FABRICATION OF A MICRO ELECTROSTATIC VIBRATION-TO-ELECTRICITY ENERGY CONVERTER

Yi Chiu (1) , Chiung-Ting Kuo (1) , Yu-Shan Chu (1)

1 Department of electrical and control engineering

This paper presents a micro electrostatic vibration-toelectricity energy converter. For the 3.3 V supply voltage and 1cm2 chip area constraints, optimal design parameters were found from theoretical calculation and Simulink simulation. In the current design, the output power is 200 µW/cm2 for the optimal load of 8 MΩ. The device was fabricated in a silicon-on-insulator (SOI) wafer. Mechanical and electrical measurements were conducted. Residual particles caused shortage of the variable capacitor and the output power could not be measured. Device design and fabrication processes are being refined.

Mots clés: micro power generators; scavenging energy; energy conversion; electrostatic; SOI wafer

Domaines: Architectures Matérielles [cs.AR]

Yi Chiu, Chiung-Ting Kuo, Yu-Shan Chu. DESIGN AND FABRICATION OF A MICRO ELECTROSTATIC VIBRATION-TO-ELECTRICITY ENERGY CONVERTER. DTIP 2006, Apr 2006, Stresa, Lago Maggiore, Italy. 6 p. ⟨hal-00189302⟩