VIBRATIONAL ENERGY SCAVENGING WITH SI TECHNOLOGY ELECTROMAGNETIC INERTIAL MICROGENERATORS

C. Serre (1) , A. Pérez-Rodriguez (1) , N. Fondevilla (1) , J.-R. Morante (1) , J. Montserrat (2) , J. Esteve (2)

1 EME/CEMIC/CERMAE, Dept. Electrònica
2 CNM-CSIC

In this work, we present the design and optimization of an electromagnetic inertial microgenerator for energy scavenging applications, compatible with Si technology. It consists of a fixed micromachined coil and a movable magnet (inertial mass) mounted on a resonant structure (Kapton® membrane). The modeling of the device, based on a velocity damped resonator, includes the losses related to the coil series resistance and has allowed the analysis of the design and loading conditions required to optimize both the generated power and output voltage. The characterization of a first (not optimized) prototype has allowed the validation of the model, which is then used as a roadmap for a number of optimizations for the final device design. For this design, the model developed shows the possibility to achieve power levels up to hundreds of µW's, with voltage levels compatible with the requirements of standard rectifying circuits.

Mots clés: Power microgenerators; electromagnetic inertial generators; vibrational energy scavenging

Domaines: Architectures Matérielles [cs.AR]

C. Serre, A. Pérez-Rodriguez, N. Fondevilla, J.-R. Morante, J. Montserrat, et al.. VIBRATIONAL ENERGY SCAVENGING WITH SI TECHNOLOGY ELECTROMAGNETIC INERTIAL MICROGENERATORS. DTIP 2006, Apr 2006, Stresa, Lago Maggiore, Italy. 6 p. ⟨hal-00189301⟩