MICRO-BALL LENS ARRAY FABRICATION IN PHOTORESIST USING PTFE HYDROPHOBIC EFFECT

Ruey-Fang Shyu (1) , Hsiharng Yang (2, 3) , Wen-Ren Tsai (2) , Jhy-Cherng Tsai (4)

1 Department of mechanical manufacturing engineering
2 Institute of Precision Engineering
3 Center of nanoscience and Nanotechnology
4 ep. of Mechanical Engineering

This paper presents a simple method to fabricate micro-ball lens and its array. The key technology is to use the hydrophobic characteristics of polyterafluoroethylene (PTFE) substrate. High contact angle between melted photoresist pattern and PTFE can generate micro-ball lens and its array. PTFE thin film was spun onto a silicon wafer and dried in oven. Photoresist AZ4620 was used to pattern micro-columns with different diameters 60, 70 and 80 µm. A thermal reflow process then was applied to melt these micro-column patterns resulted in micro-ball lens array. The achieved micro-ball lens array with diameter 98 µm was fabricated using 80 µm in diameter patterns. This method provides a simple fabrication process and low material cost.

Mots clés: Micro-ball lens; optical communication; lithography process

Domaines: Architectures Matérielles [cs.AR]

Ruey-Fang Shyu, Hsiharng Yang, Wen-Ren Tsai, Jhy-Cherng Tsai. MICRO-BALL LENS ARRAY FABRICATION IN PHOTORESIST USING PTFE HYDROPHOBIC EFFECT. DTIP 2006, Apr 2006, Stresa, Lago Maggiore, Italy. 6 p. ⟨hal-00189267⟩