ANALYSIS OF PACKAGING EFFECTS ON THE PERFORMANCE OF THE MICROFLOWN

J.W. van Honschoten (1) , D.-R. Yntema (1) , M. Dijkstra (1) , V.-B. Svetovoy (1) , R.-J. Wiegerink (1) , M. Elwenspoek (1)

1 MESAplus Institute

The packaging effects of an acoustic particle velocity sensor have been analysed both analytically and by means of finite volume simulations on fluid dynamics. The results are compared with acoustic experiments that show a large magnification of the output signal of the sensor due to the mounting inside a cylindrically shaped package. The influences of the package consist of a decrease of the output signal at frequencies below 1 Hz, whereas signals with frequencies above 10 Hz are amplified by a constant factor of approximately 3.5 (11 dB). The analysis leads to an improved insight into the effects of viscosity and fluid flow that play a role in flow sensing and opens the way for further optimisation of sensitivity and bandwidth of the sensor.

Mots clés: Devices; components (sensors; actuators; ...)

Domaines: Architectures Matérielles [cs.AR]

J.W. van Honschoten, D.-R. Yntema, M. Dijkstra, V.-B. Svetovoy, R.-J. Wiegerink, et al.. ANALYSIS OF PACKAGING EFFECTS ON THE PERFORMANCE OF THE MICROFLOWN. DTIP 2006, Apr 2006, Stresa, Lago Maggiore, Italy. 6 p. ⟨hal-00189249⟩