Effect of partial sensitive coating coverage on the limit of detection of microcantilever chemical gas sensors

Frédéric Lochon (1) , Isabelle Dufour (1) , Stephen Heinrich (2) , Fabien Josse (3) , Dominique Rebiere (1)

1 IMS - Laboratoire de l'intégration, du matériau au système
2 Department of Civil, Construction and Environmental Engineering [Milwaukee]
3 Department of Electrical and Computer Engineering

The effect of partially coating the microcantilever's length in chemical sensor applications is studied. By only coating near the free end of the cantilever, energy loss associated with the coating's viscoelasticity can be reduced, which, in turns, improve the vibrating beam quality factor without substantially compromising sensitivity. As a result, combinations of coating thickness and beam coverage exist that minimizes the sensor limit of detection (LOD).

Domaines: Micro et nanotechnologies/Microélectronique

Frédéric Lochon, Isabelle Dufour, Stephen Heinrich, Fabien Josse, Dominique Rebiere. Effect of partial sensitive coating coverage on the limit of detection of microcantilever chemical gas sensors. 11th International Meeting on Chemical Sensors, 2006, Brescia, Italy. pp.2. ⟨hal-00183270⟩