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| HAL: hal-00182901, version 1 |
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| 22nd IEEE Instrumentation and Measurement Technology Conference (IMTC) 2005, Canada (2005) |
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| Intra-IC Inspection and Metrology with Picosecond Laser Ultrasonics |
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| Grégory Andriamonje 1Vincent Pouget 1 |
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| (2005) |
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| 1: | Laboratoire de l'intégration, du matériau au système (IMS) |
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CNRS : UMR5218 – Université Sciences et Technologies - Bordeaux I – Institut Polytechnique de Bordeaux |
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| Subject | : | Engineering Sciences/Micro and nanotechnologies/Microelectronics |
| hal-00182901, version 1 | |
| http://hal.archives-ouvertes.fr/hal-00182901 | |
| oai:hal.archives-ouvertes.fr:hal-00182901 | |
| From: Ims Import | |
| Submitted on: Monday, 29 October 2007 13:11:02 | |
| Updated on: Monday, 29 October 2007 14:37:04 | |
