Modelling and Robust Position/Force Control of a Piezoelectric Microgripper.

Micky Rakotondrabe (1) , Cédric Clévy (1) , Philippe Lutz (1)

1 LAB - Laboratoire d'automatique de Besançon

This paper deals with the control of a piezoelectric microgripper based on two piezocantilevers. To avoid the destruction of the manipulated micro-object and to permit a high accurate positioning, the microgripper is controlled on position and on force. Each piezocantilever is separately modelled and controlled : while the one is controlled on position, the second is controlled on force. Because the models are subjected to uncertainties and the micromanipulation requires good performances, a H robust controller is designed for each system. The experiments end the paper and show that good performances are obtained.

Domaines: Micro et nanotechnologies/Microélectronique

Micky Rakotondrabe, Cédric Clévy, Philippe Lutz. Modelling and Robust Position/Force Control of a Piezoelectric Microgripper.. Third Annual IEEE Conference on Automation Science and Engineering, CASE'2007., Sep 2007, Scottsdale, Arizona, United States. sur CD ROM - 6 p. ⟨hal-00182296⟩