Condensation coefficients in plasma sputtering deposition

Pascal Brault (1) , A.-L. Thomann (1) , J.-P. Rozenbaum (1)

1 GREMI - Groupe de recherches sur l'énergétique des milieux ionisés

Optical emission spectroscopy and Rutherford backscattering spectrometry are combined to determine condensation coefficients for plasma sputtering deposition. The method is applied for palladium deposition onto various substrates and condensation coefficients are found to lie between 0.4 and 0.9.

Domaines: Plasmas

Pascal Brault, A.-L. Thomann, J.-P. Rozenbaum. Condensation coefficients in plasma sputtering deposition. Journal of Physics D: Applied Physics, 2007, 40, pp.2121-2123. ⟨10.1088/0022-3727/40/7/039⟩. ⟨hal-00180178⟩