Electron beam observability and controllability for the debugging of integrated circuits

I. Guiguet (1) , D. Micollet (1) , J. Laurent (1) , B. Courtois (1)

1 TIM3

Observability and controllability using an electron beam are addressed in this paper. For observability, a link between a CALMA description and a scanning electron microscope (SEM), based on a superimposition technique, is detailed. For controllability, a study of the electron beam induced current (EBIC) phenomenon in a diffused diode is presented.

Mots clés: electron-beam-observability; electron-beam-controllability; voltage-contrast; debugging-of-integrated-circuits; CALMA-description

Domaines: Micro et nanotechnologies/Microélectronique

I. Guiguet, D. Micollet, J. Laurent, B. Courtois. Electron beam observability and controllability for the debugging of integrated circuits. Twelfth European Solid State Circuits Conference (ESSCIRC'86), Sep 1986, Delft, Netherlands. pp.181-183. ⟨hal-00013433⟩